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United States Utility Patents 6,489,620 - 6,489,629
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| Number | | Title |
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6,489,620 |
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Astigmatism-correction device and charged-particle-beam microlithography apparatus and methods comprising same |
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6,489,621 |
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Particle beam system with a device for reducing the energy width of a particle beam |
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6,489,622 |
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Apparatus for decelerating ion beams with minimal energy contamination |
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6,489,623 |
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Shipping container for radioactive materials and methods of fabrication |
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6,489,624 |
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Apparatus and methods for detecting thickness of a patterned layer |
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6,489,625 |
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Coordinate transforming method in position setting means of observation device and observation device equipped with coordinate transforming means |
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6,489,626 |
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Wafer orientation sensor for GaAs wafers |
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6,489,627 |
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Method for inspecting a reticle and apparatus for use therein |
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6,489,628 |
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High electron mobility transistor and power amplifier |
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6,489,629 |
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Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same |
For U.S. patent law, rules, and procedures see MPEP.
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