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United States Utility Patents
6,489,620 - 6,489,629

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NumberTitle
6,489,620 Astigmatism-correction device and charged-particle-beam microlithography apparatus and methods comprising same
6,489,621 Particle beam system with a device for reducing the energy width of a particle beam
6,489,622 Apparatus for decelerating ion beams with minimal energy contamination
6,489,623 Shipping container for radioactive materials and methods of fabrication
6,489,624 Apparatus and methods for detecting thickness of a patterned layer
6,489,625 Coordinate transforming method in position setting means of observation device and observation device equipped with coordinate transforming means
6,489,626 Wafer orientation sensor for GaAs wafers
6,489,627 Method for inspecting a reticle and apparatus for use therein
6,489,628 High electron mobility transistor and power amplifier
6,489,629 Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same



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